Micromechanical Structures for Photonic Crystal Waveguide Switches
نویسندگان
چکیده
We report design and fabrication process of MEMS (Micro Electro Mechanical Systems) actuators for a new type of optical switch integrated with photonic crystal (PhC) waveguides. Thin film poly-silicon electrostatic microactuator (either a cantilever or a bridge style) is placed over a PhC waveguide to induce optical modulation by means of mechanical motion in the evanescent fields. For low voltage operation (< 10 V dc), we have used electrostatic simulation to design optimal parameters for the MEMS movable parts. Measurement using Laser Doppler Vibrometer has shown 15 nm mechanical motion of the modulator tip with a drive voltage of only 1 V.
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